Design and Fabrication of a One-Port Phononic Plate Wave Resonator
Date Issued
2010
Date
2010
Author(s)
Kuo, Chen-Yu
Abstract
This thesis reports numerical analysis and experimental results of a one-port plate wave resonator using two-dimensional phononic crystal (PC) gratings. Based on the band gap effect of the PC, i.e. acoustic waves in a specific frequency are blocked by the PC, PC was utilized as the reflectors of a resonator. The dispersion relations of phononic crystals were calculated by using the finite element method (FEM). To optimize the resonance inside the cavity, the effective reflective plane was obtained through a series of numerical simulations. Attention has been also focused on frequency differences between the lowest anti-symmetric (A0) modes within a resonant cavity. The relation between the cavity length and the frequency difference was analyzed by supercell technique.
On the experimental side, one-port ZnO/Si plate wave resonators with square-lattice PC reflective gratings were fabricated. The measured resonant frequencies of the cavity are in a good agreement with the numerical predictions. In addition, the measurement result showed that a high Q factor of 3885 can be achieved at 159.08 MHz resonant frequency.
Subjects
Plate wave resonator
Phononic crystal
Band gap
Finite element method
Resonant mode
Q factor
Type
thesis
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