A New Transferred Ultra-thin Silicon Micropackaging

Resource

Journal of Micromechanics and Microengineering 12 (4): 406-409

Journal

Journal of Micromechanics and Microengineering

Journal Volume

12

Journal Issue

4

Pages

406-409

Date Issued

2002-06

Date

2002-06

Author(s)

Jen-Yi Chen

Long-Sun Huang

Chia-Hua Chu

DOI

10.1088/0960-1317/12/4/310

URI

http://ntur.lib.ntu.edu.tw//handle/246246/106974

File(s)

Name

06.pdf

Size

188.46 KB

Format

Adobe PDF

Checksum

(MD5):23e6d1336fa31e44c854b8b4c0626bbe