Analysis and design of a two-mode piezoelectric actuator for precision positioning
Part Of
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
13946
Start Page
139460P
ISSN
0277786X
ISBN (of the container)
9781510698338
ISBN
9781510698338
Date Issued
2026-04-16
Author(s)
Abstract
This study reports on the design of a miniature piezoelectric motor for precision positioning. The actuator consisted of a 45 × 25 × 0.6 mm3 glass plate bonded with one 0.2mm thick PZT layer and which operated under double simply supported and double free (SS-FF) boundary conditions. An analytical model was established to derive the mode shapes, and finite element analysis was used to validate the resonance frequencies. To achieve linear motion with micro-displacement capability, a multi-integer-frequency-Two-mode (MIF-TM) driving method was employed. Bending modes 21 and 41 were superimposed to generate traveling waves in the x-direction, while the PZT placement was optimized based on bending moment and integral differences to excite the target modes and suppress the adjacent modes. The Hilbert-Transform-based cost function was used to evaluate the traveling-wave activation efficiency and to optimize the driving parameters, which enhanced stability and precision in displacement control.
Event(s)
20th Active and Passive Smart Structures and Integrated Systems, 16 March 2026 - 18 March 2026, Vancouver
Subjects
bending modes
Hilbert transform
multi-integer frequency two-mode
piezoelectric actuator
Publisher
SPIE
Type
conference paper