Robust QFT control of a three-axis nano-positioning stage
Journal
IEEE International Symposium on Industrial Electronics
Pages
1330-1334
ISBN
1424416655; 9781424416653
Date Issued
2008
Author(s)
Luo Q.-R.
Abstract
A novel three-axis nano-positioning device is proposed which consists of an X-Y table and a rotational stage on top of the X-Y table. Each stage is actuated by piezoactuator and the motion is sensed by laser displacement sensors. The simplified model of the stage was derived and the finite element model was developed to analyze the motion of the stage. Then the QFT algorithm was proposed to design robust controllers for the stage. It was found that the rise time of the stage is about 0.1 sec for a 10 um input. The positioning accuracy can achieve is within 0.1um.
Type
conference paper