Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

Resource

Journal of Materials Research, 26(10), 1279-1284

Journal

Journal of Materials Research

Pages

1279-1284

Date Issued

2011

Date

2011

Author(s)

Lin, Chiao-Chi

Fang, Weileun

Lin, Hung-Yi

Lee, Sanboh

DOI

URI

Type

journal article

File(s)

Name

193.pdf

Size

23.49 KB

Format

Adobe PDF

Checksum

(MD5):3162b8d55d2f9867ca2b80a59054c31b