Beveling AT-cut quartz resonator design by an efficient numerical method
Journal
Proceedings - IEEE Ultrasonics Symposium
Journal Volume
3
Pages
1848-1851
Date Issued
2005
Author(s)
Abstract
In recent years, the rapid progress of personal communication system pushes the size of circuit device to become smaller and smaller. For the miniaturization of quartz resonator, the role of an efficient and precision simulation tool is becoming more and more important. Based on Mindlin's 2-D model and Lee-Brebbia's (1) FEA method, Pao (2) et al. presented an efficient numerical method in calculating the electrical impedance of different modes of AT-cut quartz crystal resonator. This method considers not only the pure mechanical vibration but also the electrical response so we can identify different modes easily. To achieve good energy trapping, beveling process in low frequency and small size AT-cut quartz resonator is very important. It is very difficult to simulate that by general 3-D piezoelectric model because it is hard to mesh elements in the thickness direction with slight thickness variation. In this paper, we use the efficient numerical method we presented last year and the mass loading effect concepts to develop a program tool to simulate the characteristic of a beveling quartz plate. By this tool, we can easily obtain the electrical gain response and vibration mode shapes. At the same time, it can also predict the electrical response change with beveling. We present an actual quartz resonator design to show how we use this program tool to design the beveling process and how to suppress the dominating unwanted modes. The simulation result is consistent with that of the experimental data.
SDGs
Type
conference paper