Improved RF Performance with Buried Power Rail and Contact over Active Gate in Nanosheet FETs
Part Of
Proceedings - IEEE International Symposium on Circuits and Systems
ISBN (of the container)
979-835033099-1
Date Issued
2024-05-19
Author(s)
Hao-Chi Chiu
Event(s)
2024 IEEE International Symposium on Circuits and Systems (ISCAS)
Publisher
IEEE
Type
conference paper