Microfabrication using silicon mold inserts and hot embossing
Resource
Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium
Journal
Micro Machine and Human Science, 1996.
Pages
-
Date Issued
1996-10
Date
1996-10
Author(s)
Lin, Liwei
Chiu, Chun-Jung
Bache, Walter
Heckele, Mathias
DOI
N/A
Abstract
We have successfully demonstrated the feasibility of fabricating three-dimensional microstructures by using a combined silicon mold insert and micro hot embossing process (SMIHE). Anisotropic silicon wet etching process has been used to define microstructures on top of a four inch silicon wafer. The whole wafer is then used as the mold insert in a micro hot pressing machine to duplicate plastic microstructures repeatedly. Fine micro pyramid shape microstructures with base width of 30 /spl mu/m and height of about 21 /spl mu/m have been fabricated by this method as a demonstration. They have very smooth surfaces and may be suitable for optical applications. This new process shows promise for achieving high yield, reliable fine microstructures on plastic films.
Type
other
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