Microfabrication using silicon mold inserts and hot embossing

Resource

Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium

Journal

Micro Machine and Human Science, 1996.

Pages

-

Date Issued

1996-10

Date

1996-10

Author(s)

Lin, Liwei

Chiu, Chun-Jung

Bache, Walter

Heckele, Mathias

DOI

DOI

N/A

URI

Type

other

File(s)

Name

00563403.pdf

Size

719.89 KB

Format

Adobe PDF

Checksum

(MD5):7acbe64e294f791779b56e7c4248e00c