Infrared Sensor by Inkjet Printing Cytochrome C on Suspending Aluminum Electrodes of Post CMOS Process
Date Issued
2015
Date
2015
Author(s)
Liang, Shuo-Feng
Abstract
The cytochrome c (protein) thin film has been reported high temperature coefficient of resistance (TCR). In this paper, we conducted a series of experiment to analyze the property of Cytochrome C protein. The absorption coefficient is measured around 65% in 8~12 μm. We found that the surface roughness resulted in the resistance difference. We discovered that Cytochrome C protein raised TCR of sensing material, but it conductivity is low. Therefore, the buffer solution was needed acting as electrolyte to increase electrical conductance and keep the PH value at 7. However the buffer solution diluted the Cytochrome C solution. After knowing the property of the protein solution, we selected the best preparing ratio of the protein solution as the sensing material. We designed CMOS circuit to integrate with cytochrome c protein as a microbolometer. The MEMS structure was based on the working formula, and then the protein solution was put on the sensing pixel by using inkjet printer. The chip’s TCR, thermal conductance, time constant and responsivity were 25.98 %/K, 7.96E-5 W/K, 1.094ms and 2.57E+5 V/W at 2μA. In the long run, the fabrication of microbolometer was successfully compatible with CMOS process.
Subjects
Cytochrome C protein
Infrared sensing
Microbolometer
Temperature coefficient of resistance (TCR)
Responsivity
MEMS
Type
thesis