Enhanced extreme ultraviolet lithography mask inspection contrast using fabry-perot type antireflective coating

Journal

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Journal Volume

43

Journal Issue

6 B

Pages

3703-3706

Date Issued

2004

Author(s)

Cheng, H.-C.

Chen, H.-L.

Ko, T.-S.

Lai, L.-J.

Ko, F.-H.

Chu, T.-C.

DOI

URI

URL

Type

conference paper