Micromachined substrate slots for Rf on-chip isolation
Journal
Microwave and Optical Technology Letters
Journal Volume
57
Journal Issue
3
Pages
643-645
Date Issued
2015
Author(s)
Abstract
A CMOS-compatible substrate slotting technique is demonstrated in CMOS 0.18 µm technology to improve RF isolation. Isolations in 50 and 100 µm distances are improved by 32 and 28 dB, respectively. Experiments show substrate signal attenuates isotropically on the substrate surface and a substrate network that can model the substrate slot. © 2015 Wiley Periodicals, Inc. Microwave Opt Technol Lett 57:643–645, 2015
SDGs
Type
journal article