Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage

Journal

Proceedings of the Institution of Mechanical Engineers. Part I: Journal of Systems and Control Engineering

Journal Volume

231

Journal Issue

5

Pages

414-424

Date Issued

2017

Author(s)

Wen S.-F.

Yen J.-Y.

Liu S.-T.

Chen M.-S.

Chen Y.-Y.

Hung C.-W.

DOI

URI

Publisher

SAGE Publications Ltd

Type

conference paper