Induction of ferroelectricity in nanoscale ZrO2/HfO2 bilayer thin films on Pt/Ti/SiO2/Si substrates

Journal

Acta Materialia

Journal Volume

115

Pages

68-75

Date Issued

2016

Author(s)

Lu Y.W.

TZONG-LIN JAY SHIEH

DOI

10.1016/j.actamat.2016.05.029

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84971659448&doi=10.1016%2fj.actamat.2016.05.029&partnerID=40&md5=e10ef4c93da46b3ee303ec6d4016264e

https://scholars.lib.ntu.edu.tw/handle/123456789/433228

Publisher

Elsevier Ltd

Type

journal article