Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process
Journal
Materials Today Advances
Journal Volume
22
Start Page
100496
ISSN
2590-0498
Date Issued
2024-06
Author(s)
Yu-Hsuan Hsu
Yun-Cheng Hsu
Yi-Hsin Lin
Dong-Sing Wuu
Hao-Chung Kuo
Seiji Samukawa
Ray-Hua Horng
SDGs
Publisher
Elsevier BV
Type
journal article