Optical properties of cubic SiC grown on Si substrate by chemical vapor deposition

Resource

Microelectronic Engineering 83 (1): 165-169

Journal

Microelectronic Engineering

Journal Volume

83

Journal Issue

1

Pages

165-169

Date Issued

2006

Date

2006

Author(s)

Feng, Zhe Chuan

URI

Type

journal article

File(s)

Name

18.pdf

Size

164.48 KB

Format

Adobe PDF

Checksum

(MD5):b27e753b83af1e783850c608df6e9c82