An AFM Probe Controller Design Based on μ-synthesis
Resource
Asian Journal of Control 7 (1): 12-19
Journal
Asian Journal of Control
Journal Volume
7
Journal Issue
1
Pages
12-19
Date Issued
2005
Date
2005
Author(s)
Abstract
The atomic force microscope (AFM) is one of the most important tools for measuring atomic resolution. The AFM system maintains constant force between a tip and the sample in order to track the sample topography. The controller that maintains the constant interaction force plays a significant role in measurement accuracy. This paper presents a μ-synthesis controller design to deal with model uncertainty and establish a measurement error bound. The system's nonlinearity and the set-point drift are lumped into a multiplicative uncertainty. The performance bound allows specification of the error magnitude over the frequency range. Simulation results show that the proposed control can tolerate uncertainties. The error spectrum from the experiments shows consistency with the design specifications. Images were taken to compare μ-synthesis control with a well-tuned PID control at a 480 μm/s scan rate. The results verify the outstanding performance of the μ-controller.
Subjects
And PID control; Atomic force microscope; Multiplicative uncertainty; μ-synthesis
Type
journal article
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