The Development of a Precision Abbé-free Three-axis Moving Stage
Date Issued
2007
Date
2007
Author(s)
Wu, Pei-Tsung
DOI
zh-TW
Abstract
Positioning technique is the basic requirement in manufacturing, measuring, and operating machines. Recently, the need of fabrication precision has progressed from micrometer to nanometer. However, it’s rather difficult for traditional industry to achieve the requirement of nanometer level because the vibration of operating machines and the errors of assembling machines or the influences of process environment and process stress make the limit. But it’s more probable for measuring to acquire the nano-degree technology of precise positioning. Thus, it’s worthwhile to develop a movable platform with precise locating function and a location finder with high sensitivity and accuracy.
This work brings out the idea to use piezoelectric ceramic linear motor(PCLM) as the actuator and to develop a three-axis long range movable platform composing an independent Z-axis and formed X-axis and Y-axis. Conventionally, the X-Y axes platform stack by two one-dimensional single axis platforms. However, this work was the theory of coplanar stage to design a double X-Y-axes platform in order to decrease the Abbé error.
In the same time, this research take compact linear diffraction grating interferometer as local detection device of this machine.It outputs a series of steady precise analytical displacement signals and proves a precison Abbé-free three-axis moving stage of this machine.
Subjects
共平面平台
壓電陶瓷線性馬達
阿貝誤差
線性繞射光柵干涉儀
coplanar stage
piezoelectric ceramic linear motor
Abbé
error
linear diffraction grating interferomete
Type
thesis
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