Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write
Journal
23rd International Microprocesses and Nanotechnology Conference (MNC 2010)
Date Issued
2010
Author(s)
Fu-Min Wang
Kuen-Yu Tsai
Alek C. Chen
Yen-Min Lee
Yu-Tian Shen
Hsin-Hung Cheng
Chieh-Hsiang Kuan
Type
poster