Fabrication of Alignment Layer of Liquid Crystal Display by Electron Beam Lithography
Date Issued
2005
Date
2005
Author(s)
Sia, Shao Hwang
DOI
en-US
Abstract
In the liquid crystal display (LCD) industry, alignment of liquid crystal is done by conventionally rubbing method. Although this method is very simple and convenient, there will be dust particle and electric static charge left on polymer. Also the mechanism is still unknown. In 1972, Berreman suggested that the alignment of liquid crystal after rubbing treatment to the surface is because of the ultrafine grooving structure formed and alignment along the grooving structure would reach a minimum energy. In the thesis, we try to create a new liquid crystal alignment method based on Berreman’s theoretical model to produce ultrafine grooving structure to be the alignment layer of liquid crystal by electron beam lithography. This would also avoid problems induced during rubbing. It is shown that the newly-developed alignment method has great behavior of liquid crystal alignment. Then we try to measure the azimuthal anchoring energy of a liquid crystal cell made by such method to quantitatively judge the degree of alignment, and observe the relation between the grating pitch and the azimuthal anchoring energy. We also measure the optical properties such as V-T curves and the response time of the LC aligned by different pitches of grooves to characterize the groove alignment method.
Subjects
電子束微影蝕刻
液晶
顯示器
配向層
Alignment Layer
Liquid Crystal Display
Electron Beam Lithography
Type
thesis
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