Growth of high-quality SiGe films with a buffer layer containing Ge quantum dots

Journal

Thin Solid Films

Journal Volume

508

Journal Issue

1-2

Pages

120-123

Date Issued

2006

Author(s)

Lee, S.W.

Chen, P.S.

Chien, T.Y.

Chen, L.J.

Chia, C.T.

DOI

10.1016/j.tsf.2005.08.395

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/502092

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33646105865&doi=10.1016%2fj.tsf.2005.08.395&partnerID=40&md5=283e22b8ea265769244d4748324128c3

Type

journal article