Growth and properties of double-sided YBCO films deposited by off-axis sputtering for microwave applications
Journal
Journal of Low Temperature Physics
Journal Volume
131
Journal Issue
3-4
Pages
551-556
Date Issued
2003
Author(s)
Abstract
The double-sided YBa2Cu3Oy (YBCO) films were grown on LaAlO3 (LAO) substrates by an off-axis magnetron sputtering system with two 2-inch sputtering guns. High-quality YBCO films within a 50-mm-diameter area were obtained. The homogeneous YBCO films revealed transition temperature Tc(R=O of ≥ 86 K and a critical current density Jc (zero field) of ∼ 1.5 × 106 A/cm2 at 77 K. The surface impedance of YBCO films was measured using a probe-coupling type microstripline resonator method. The surface resistance Rs of ∼ 1.8 μΩ was obtained at 77 K around 2180 MHz. Additionally, a HTS three-pole bandpass filter was fabricated and revealed a good microwave characteristics. The influence of surface roughness on microwave properties of YBCO films was discussed.
Type
journal article