Directly patterning ferroelectric films by nanoimprint lithography with low temperature and low pressure

Resource

The Journal of Vacuum Science and Technology B 24 (6): 3234-3238

Journal

The Journal of

Journal Volume

Vacuum

Journal Issue

6

Pages

3234-3238

Date Issued

2006

Date

2006

Author(s)

Hsieh, K. C.

Chen, H. L.

Lin, C. H.

Lee, C. Y.

URI

http://ntur.lib.ntu.edu.tw//handle/246246/95625

Type

journal article

File(s)

Name

27.pdf

Size

616.94 KB

Format

Adobe PDF

Checksum

(MD5):d65ac68b057ca8310cf9220e6a81f911