Extraction of Frequency Dependent Macromodels for MEMS Squeeze-film Damping Effects

Resource

Journal of Mechanics,21(4),227-234.

Journal

Journal of Mechanics

Journal Volume

21

Journal Issue

4

Pages

227-234

Date Issued

2005-01

Date

2005-01

Author(s)

Yang, Y.-J.

Chien, C.-M.

Kamon, M.

Rabinovich, V. L.

Gilbert, J. R.

URI

Type

journal article