Conceptual Design of Planar Retainer Mechanisms for Bottom-Opening SMIF Environment
Resource
Proceedings of the 11th World Congress in Mechanism and Machine Science
August 18~21, 2003, Tianjin, China
August 18~21, 2003, Tianjin, China
Journal
Proceedings of the 11th World Congress in Mechanism and Machine Science
August 18~21
August 18~21
Pages
-
Date Issued
2003-08-21
Date
2003-08-21
Author(s)
Pai, Wei-Ming
Chen, Dar-Zen
Lee, Jyh-Jone
Wu, Tzong-Ming
DOI
20060927120047398753
Abstract
This paper presents an efficient and systematic
methodology for the conceptual design of planar retainer
mechanism. The mechanism is used to hold wafers in a wafer
container and prevent wafers from collision and scrape during
transportation. At the request of high cleanliness, the mechanism
is required to have least frictional motion to avoid generating
particles inside the wafer container. These conceptual functions
of retainer mechanism are embodied as functional requirements
for the motions of mechanism’s key links. From the functional
requirements, it is possible to construct the admissible key-links
chain. The key-links chain is then assigned into feasible graphs
existing in the atlas. In addition to the key-links chain in the
feasible graphs, the remaining links and joints confining the
mechanism motion to the specific mobility and nature of motion
can be identified. Admissible retainer mechanisms can be finally
obtained by assigning appropriate specifications of the remaining
joints.
Subjects
Retainer mechanism
SMIF
Wafer container
Publisher
臺北市:國立臺灣大學機械工程學系
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
0031.pdf
Size
192.65 KB
Format
Adobe PDF
Checksum
(MD5):ce43cca9313bc17fdd52f7baa92dedfb