Synthesis and characterization of fluorinated aminoalkoxide and iminoalkoxide gallium complexes: Application in chemical vapor deposition of Ga2O3 thin films
Journal
Organometallics
Journal Volume
23
Journal Issue
1
Pages
95-103
Date Issued
2004
Author(s)
Chi, Y.
Chou, T.-Y.
Wang, Y.-J.
Huang, S.-F.
Carty, A.J.
Scoles, L.
Udachin, K.A.
Lee, G.-H.
SDGs
Type
journal article