Shack-Hartmann Wavefront Sensor for Multiaxial Actuation Measurement
Date Issued
2015
Date
2015
Author(s)
Chang, Che-Wei
Abstract
After STM was invented, phenomenon in nanometer dimension could be observed. In this thesis, we present a multiaxial actuation measurement system by using Shack-Hartmann wavefront sensor (SHWS). According to our preliminary analysis and experiment, it is found that the tilting and actuating motions of actuator have influences on Zernike tilting and defocusing modals. For developing the system, the optical engineering software is applied to prove its operational feasibility and to optimize its performance. Appropriate wavefront type is chosen to optimize the measurement ability. Wavefront without any optical path difference couldn’t be applied on linear displacement measurement. On the other hand, wavefront without defocus optical path difference with different diameter should trade off to apply on angular measurement. The system performance is also experimentally verified by using autocollimator and laser rangerfinger. Our multiaxial measurement system will be devoted to studying the cross coupling behavior of multiaxial actuation.
Subjects
Shack-Hartmann Wavefront Sensor
Zernike polynomials
Actuation performance
Multiaxial measurement
Reflective measurement
Type
thesis
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