Investigation of the wear of the pad conditioner in chemical mechanical polishing process

Journal

Advanced Materials Research

Journal Volume

76-78

Pages

195-200

Date Issued

2009

Author(s)

Liao, Y.S.

Yang, C.T.

YUNN-SHIUAN LIAO

DOI

10.4028/www.scientific.net/AMR.76-78.195

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448648

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-73949086071&doi=10.4028%2fwww.scientific.net%2fAMR.76-78.195&partnerID=40&md5=000301e999deed1a68ad0b9d59b16c06

Type

conference paper