A method integrating optimal algorithm and FEM on CMOS residual stress

Journal

Journal of Mechanics

Journal Volume

30

Journal Issue

2

Pages

123-128

Date Issued

2014

Author(s)

Chuang, W.C.

Lin, D.T.W.

Hu, Y.-C.

Lee, H.-L.

Cheng, C.-H.

Chang, P.-Z.

Quyen, N.B.

DOI

10.1017/jmech.2013.51

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486813

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84898413395&doi=10.1017%2fjmech.2013.51&partnerID=40&md5=d6e60fb2255688a682b8771f093e1ee8

Type

journal article