Crack-free micromachining on glass using an economic Q-switched 532 nm laser

Journal

Journal of Micromechanics and Microengineering

Journal Volume

16

Journal Issue

11

Pages

2420-2424

Date Issued

2006

Author(s)

Cheng J.-Y

Yen M.-H

Tai-Horng Young

DOI

10.1088/0960-1317/16/11/024

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/465483

SDGs

[SDGs]SDG12

Type

journal article