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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Refractive index, absorbance and thickness measurement of underlayer materials for the EUV lithography at 13.5-nm
Details
Refractive index, absorbance and thickness measurement of underlayer materials for the EUV lithography at 13.5-nm
Journal
2008 NSRRC Users' Meeting
Date Issued
2008
Author(s)
Fu-Hsiu Kang
Grace.H. Ho*
Hok-Sum Fung
Huang-Wen Fu
Chia-Chun Hung
JIA-HAN LI
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/590937
Type
technical report
