Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution

Journal

中國機械工程學刊

Journal Volume

38

Journal Issue

3

Pages

253-260

Date Issued

2017

Author(s)

范光照(Kuang-Chao Fan)

林器躉(Chi-Duen Lin)

李瑞君(Ruijun Li)

陳亮嘉(Liang-Chia Chen)

Yuri Chugui

URI

Publisher

中國機械工程學會

Type

journal article