Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators

Journal

Journal of Microelectromechanical Systems

Journal Volume

13

Journal Issue

2

Pages

279-289

Date Issued

2004

Author(s)

Hah, D.

Huang, S.T.-Y.

Tsai, J.-C.

Toshiyoshi, H.

Wu, M.C.

DOI

10.1109/JMEMS.2004.825314

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-1942500864&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/309158

Type

journal article