Characterization of Ge2Sb2Te5 thin film alloys using conductive-tip atomic force microscopy
Journal
Physica Status Solidi B
Journal Volume
249
Journal Issue
10
Pages
1945-1950
Date Issued
2012-08
Author(s)
Chia Min Chang
Yen Ju Liu
Ming Lun Tseng
Nien-Nan Chu
Ding-Wei Huang
Masud Mansuripur
Din Ping Tsai
Abstract
Abstract Conductive‐tip atomic force microscopy (C‐AFM) is a powerful tool for investigating the electrical characteristics of phase‐change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge 2 Sb 2 Te 5 film.
SDGs
Type
journal article
