Study for Fabricating an Anisotropic Silicon Ring Vibrating Gyroscope
Date Issued
2007
Date
2007
Author(s)
Wang, Yu-Bin
DOI
zh-TW
Abstract
This thesis presents the fabrication of a 150um tall (100) single-crystal silicon ring gyroscope with high aspect-ratio fabricated by MEMS technology. A new design of vibrating ring will be introduced to ensure the resonance frequency of both and molds being the same. Four kinds of support springs are designed and put into experiment to find out the best one. All the recipes and methods for the MEMS processes in this experiment will be described, such as BOE wet etch, ICP dry etch, photolithography, anodic bonding, and metallization.
Subjects
陀螺儀
矽材微加工
陽極接合
Gyroscope
high aspect-ratio
silicon micromachining
anodic bonding
Type
thesis
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