Studies of boron diffusivities on (001) and (110) substrate orientation in Si and Ge along vertical/out-of plane and lateral/in-plane directions by SIMS and C-V measurement on the designed test pattern
Journal
The 6th International Conference on Technological Advances of Thin Films & Surface Coatings
Date Issued
2012
Author(s)
M.-H. Liao
Description
Singapore
Type
conference paper