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College of Engineering / 工學院
Chemical Engineering / 化學工程學系
In situ observation and temperature profile study of silicon Thin-sheet growth on quartz and silicon nitride substrates
Details
In situ observation and temperature profile study of silicon Thin-sheet growth on quartz and silicon nitride substrates
Journal
Journal of Crystal Growth
Journal Volume
552
Date Issued
2020
Author(s)
Lau, V.
Lan, C.-W.
CHUNG-WEN LAN
DOI
10.1016/j.jcrysgro.2020.125938
URI
https://www.scopus.com/inward/record.url?eid=2-s2.0-85094325035&partnerID=40&md5=67ee6e1513c54831dd5fcaf672d81b71
https://scholars.lib.ntu.edu.tw/handle/123456789/547583
SDGs
[SDGs]SDG7
Type
journal article