High performance motion control of the novel optical servo scanning platform

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

5873

Pages

183-192

Date Issued

2005

Author(s)

Yeh, Y.-C.

Yen, J.-Y.

Peng, Y.-H.

Lee, J.-F.

DOI

10.1117/12.616881

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-29144455153&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/314154

SDGs

[SDGs]SDG7

Type

conference paper