On the Miller-indices Determination of Si 100 Convex Corner Undercut Planes

Resource

Journal of Micromechanics and Microengineering 15 (4): 833-842

Journal

Journal of Micromechanics and Microengineering

Journal Volume

15

Journal Issue

4

Pages

833-842

Date Issued

2005

Date

2005

Author(s)

Chang Chien, W.T.

Chang, C.O.

Lo, Y.C.

Li, Z.W.

Chou, C.S.

URI

File(s)

Name

08.pdf

Size

1.75 MB

Format

Adobe PDF

Checksum

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