Silicon waveguide sidewall smoothing by KrF excimer laser reformation

Journal

Journal of Lightwave Technology

Journal Volume

27

Journal Issue

7

Pages

887-892

Date Issued

2009

Author(s)

Hung, S.-C.

Liang, E.-Z.

DOI

10.1109/JLT.2008.923240

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-65749101958&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/350126

Type

journal article