A CMOS-Based ISFET Array for DNA Detection
Date Issued
2016
Date
2016
Author(s)
Sun, Yu-Han
Abstract
Biomolecular sensing and analysis play a pivotal role in modern clinical diagnosis. That is to detect the quantity of specific biomolecules, as biomarkers, in human body. Many DNA sequences are the biomarkers of various hereditary diseases, infectious diseases, and cancer. With the progress of personal health care and point-of- care testing system, high sensitivity and simplified procedure have become the focused development goals. Take the advantage of CMOS-based ion-sensitive field-effect transistor (ISFET), the goals shall be satisfied by integrating the conventional two- stage DNA detection technique, which requires amplification before sensing. Combining with other MEMS technology, it is expected to become a portable lab-on-a- chip in the near future. In this thesis, we apply ISFETs, fabricated by standard TSMC 0.18μm silicon- on-insulator (SOI) CMOS process, to the DNA diagnosis technologies. To test the ISFET, both stability and quantity analysis for DNA amplification are examined. The sensitivity and selectivity to specific DNA are measured as well. According to the experiment results, ISFET performs well under various conditions with high stability. It is capable of detecting the states after DNA amplifications by the electrical property. On the other hand, we improve the immobilization procedure at first hand and detect the sequence of hepatitis B virus DNA afterwards. As a result, array sensor, relative to single sensor, lowers the electrical sensing difference caused by inhomogeneous surface after immobilization.It will effectively detect the quantity of specific DNA and distinguish different kinds of DNA.
Subjects
Biomolecular sensing
biomarkers
ISFET
SDGs
Type
thesis
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