A study on the application of micro transfer imprinting technology using roller with magnetic fluid bag in microstructures replication
Resource
MICROELECTRONIC ENGINEERING, 95, 49-58
Journal
Microelectronic Engineering
Pages
49-58
Date Issued
2012
Date
2012
Author(s)
Weng, Yung-Jin
Weng, Yung-Chun
Abstract
This study discussed the application of roller with bag magnetic fluid as the pressure side mold for the structural replication printing and visual imaging of Fresnel lens micro-patterns. This study developed the bag roller system equipment and employed magnetic fluids as the transfer imprinting method of the bag roller. By the evenly distributed pressure characteristic of fluids in the bag, coupled with the technical feature of progressive printing of the roller, this study examined the structural replication formability and imaging mechanism of micro-patterns after rolling. The results suggested that the proposed micro transfer printing system using roller with magnetic fluid bag can successfully transfer the Fresnel micro structure patterns onto the photo-resist substrate. Meanwhile, relevant replication molding characteristics and the imaging on the original Fresnel lens mold were compared and discussed. © 2012 Elsevier B.V. All rights reserved.
Type
journal article
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