The Development of Fiber Confocal Microscopy
Date Issued
2007
Date
2007
Author(s)
Chen, Po-Shen
DOI
zh-TW
Abstract
Measuring technology is a key point for dimension verified in industry. With improvement of fabrication precision and micronization, micro-measuring technology becomes more important nowadays. As well as non-contact measurement technology is more flexible compared with contact measurement technology. It’s a trend for developing micro optical measurement technology.
The research was based on “shape from focus” theory adopted fringe projection method via image fiber to increase measurement accuracy and used auto-focus function , noise elimination to reconstruct 3D-profile. Because utilizing image fiber and CCD can be viewed as virtual pinholes, our developed apparatus can be regarded as a confocal system.
Experiments showed this is a useful system to measure 3D-profile of micro- to sub-micro-scaled parts. Maximum measurement deviation repetition of full-field measurement and average measured deviation was about 0.106μm and 0.048μm respectively with sample of gage block of height 4.21μm. Finally, the prototype apparatus was built up by using mechanism design. After modeling the system, maximum measurement deviation repetition of full-field measurement and average measured deviation was about 0.166μm and 0.104μm respectively with sample of gage block of height 4.21μm.
Subjects
聚焦形貌
投影條紋法
三維輪廓重建
光纖
共焦
Shape from focus
fringe projection method
3D Profile reconstruction
image fiber
Confocal
Type
thesis
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