1:6 Internal Resonance in CMOS-MEMS Multiple-Stepped CC-Beam Resonators
Journal
IEEE Symposium on Mass Storage Systems and Technologies
Journal Volume
2022-January
Pages
196-199
Date Issued
2022
Author(s)
Abstract
This work demonstrates, for the first time, internal resonance with a ratio as high as 1:6 in micromechanical CC-beam resonators. Particularly, multiple-stepped beams, ilar to that used in [1] but with additional segments, of which the specifically tailored dimensions achieve the multiplication between its 1st and 3rdin-plane modes. Based on a CMOS-MEMS process platform, the stepped structure boosts the effect of geometric nonlinearity, resulting in strong intermodal coupling which leads to the 1:6 internal resonance. Instead of applying FEA to directly obtain the dimensions, this work first transforms the Euler-Bernoulli beam equation into algebraic expressions based on the Adomian decomposition method (ADM) [2], and then locates the initial combination using contour plots for the following fine tune in FEA. In addition to internal resonance, frequency combs are observed, possibly resulting from unidirectional mechanical excitation [3]. © 2022 IEEE.
Subjects
ADM; Adomian decomposition method; CC-beam resonators; CMOS-MEMS resonators; Internal resonance; multiple-stepped beams; nonlinear resonators
Other Subjects
Algebra; Continuum mechanics; MEMS; Microelectromechanical devices; Resonance; Resonators; Adomian Decomposition Method; Beam resonators; CC-beam resonator; CMOS-MEMS; CMOS-MEMS resonator; Internal resonance; MEMS resonators; Multiple-stepped beam; Nonlinear resonators; Stepped beams; CMOS integrated circuits
Type
conference paper