Multiple patterning layout decomposition considering complex coloring rules and density balancing

Journal

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems (IEEE TCAD)

Journal Volume

36

Journal Issue

12

Pages

2080-2092

Date Issued

2017

Author(s)

Iris Hui-Ru Jiang

Hua-Yu Chang

DOI

URI

Type

journal article