Design and fabrication of a diaphragm type thermo-buckled microactuators

Journal

1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Pages

873-876

ISBN

9.78142E+12

Date Issued

2006

Author(s)

Wang J.-M.

Lin H.-H.

Lin Y.-J.

Ou Y.-C.

Yang L.-J.

Yang Y.-J.

DOI

URI

Type

conference paper