Interfacial layer reduction and high permittivity tetragonal ZrO 2 on germanium reaching ultrathin 0.39 nm equivalent oxide thickness

Journal

Applied Physics Letters

Journal Volume

102

Journal Issue

23

Date Issued

2013

Author(s)

Lin, C.-M.

Chang, H.-C.

Wong, I.-H.

Luo, S.-J.

Liu, C.W.

Hu, C.

DOI

10.1063/1.4810934

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84879073821&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/380228

Type

journal article