Fabrication and simulation of large-scale MEMS deformable mirror for wave front active control

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

7816

Date Issued

2010

Author(s)

Lin, P.-Y.

Hsieh, H.-T.

GUO-DUNG JOHN SU

DOI

10.1117/12.861097

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-77957986288&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/357869

Type

conference paper