Thermally isolated microstructures for sensors and actuators

Resource

Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on

Journal

Micro Machine and Human Science, 1995. MHS '95.

Pages

-

Date Issued

1995-10

Date

1995-10

Author(s)

Lin, Liwei

Chiao, Mu

Chu, Huey-Chi

DOI

DOI

N/A

URI

Type

other

File(s)

Name

00494222.pdf

Size

679.01 KB

Format

Adobe PDF

Checksum

(MD5):d6b043e3559f1c26ddd66ca4fa297025