Low voltage variable optical attenuator made by the low-cost micro machining wet-etching technique
Journal
Pacific Rim Conference on Lasers and Electro-Optics, CLEO
Journal Volume
2005
Pages
1374-1375
Date Issued
2005
Author(s)
Abstract
A variable optical attenuator has been fabricated by bulk silicon-micromachining. The attenuation is achieved by moving a mirror into light path. The controllable attenuation range is up to 40 dB with actuation voltage less than 3 volts.
SDGs
Type
conference paper