CMOS compatible electrochemical process for improving quality factor of spiral microinductors

Journal

Micro and Nano Letters

Journal Volume

5

Journal Issue

5

Pages

266-269

Date Issued

2010

Author(s)

Ding, Ling-Yi

Hu, Yuh-Chung

Chen, Yi-Jie

DOI

10.1049/mnl.2010.0087

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-78149273269&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/356910

Type

journal article